JPS5812280U - 石英ガラス製フランジ部の構造 - Google Patents

石英ガラス製フランジ部の構造

Info

Publication number
JPS5812280U
JPS5812280U JP10499281U JP10499281U JPS5812280U JP S5812280 U JPS5812280 U JP S5812280U JP 10499281 U JP10499281 U JP 10499281U JP 10499281 U JP10499281 U JP 10499281U JP S5812280 U JPS5812280 U JP S5812280U
Authority
JP
Japan
Prior art keywords
quartz glass
glass flange
flange
welding
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10499281U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143164Y2 (en]
Inventor
宏 鈴木
優 青木
今　民夫
Original Assignee
東芝セラミツクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝セラミツクス株式会社 filed Critical 東芝セラミツクス株式会社
Priority to JP10499281U priority Critical patent/JPS5812280U/ja
Publication of JPS5812280U publication Critical patent/JPS5812280U/ja
Application granted granted Critical
Publication of JPH0143164Y2 publication Critical patent/JPH0143164Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP10499281U 1981-07-15 1981-07-15 石英ガラス製フランジ部の構造 Granted JPS5812280U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10499281U JPS5812280U (ja) 1981-07-15 1981-07-15 石英ガラス製フランジ部の構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10499281U JPS5812280U (ja) 1981-07-15 1981-07-15 石英ガラス製フランジ部の構造

Publications (2)

Publication Number Publication Date
JPS5812280U true JPS5812280U (ja) 1983-01-26
JPH0143164Y2 JPH0143164Y2 (en]) 1989-12-14

Family

ID=29899545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10499281U Granted JPS5812280U (ja) 1981-07-15 1981-07-15 石英ガラス製フランジ部の構造

Country Status (1)

Country Link
JP (1) JPS5812280U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1053498A (ja) * 1996-08-07 1998-02-24 Yamagata Shinetsu Sekiei:Kk 半導体ウェーハの反応容器と該容器を用いた熱処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6078407B2 (ja) * 2013-04-05 2017-02-08 古河機械金属株式会社 ベルジャ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037354A (en]) * 1973-08-06 1975-04-08
JPS5623741A (en) * 1979-08-06 1981-03-06 Toshiba Ceramics Co Ltd Quartz glass furnace core tube for manufacturing semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037354A (en]) * 1973-08-06 1975-04-08
JPS5623741A (en) * 1979-08-06 1981-03-06 Toshiba Ceramics Co Ltd Quartz glass furnace core tube for manufacturing semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1053498A (ja) * 1996-08-07 1998-02-24 Yamagata Shinetsu Sekiei:Kk 半導体ウェーハの反応容器と該容器を用いた熱処理装置

Also Published As

Publication number Publication date
JPH0143164Y2 (en]) 1989-12-14

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